ISO 17560:2002 pdf download

ISO 17560:2002 pdf download.Surface chemical analysis -Secondary-ionmass spectrometry -Method for depth profiling of boron in silicon.
8.6 Calibration
8.6.1 Determination of relative-sensitivity factor
Following the procedure in 7.6.2 of ISO 14237:2000, the working relative-sensitivity factor RSFw0 and the mass discrimination correction factor 6 shall be obtained using the same measurement conditions as for the test specimen measurements. Calibration and test specimen measurements are preferably done on the same day.
8.6.2 Calibration of depth scale by stylus profilometry
8.6.2.1 Calibrate the stylus profilometer for crater depth measurements using the reference materials stipulated in
5.2, in accordance with the manufacturer’s instructions or a local documented procedure.
NOTE Precision of stylus profilometry measurements was evaluated in an interlaboratory test programme. A statistical report of the interlaboratory tests is given in annex A.
8.6.2.2 Measure the crater depth d using the calibrated stylus profilometer, in accordance with the manufacturer’s instructions or a local documented procedure. The stylus shall be scanned over the crater so that it starts from a negligibly sputtered region, passes through the central region of the crater, and stops at the other end in a negligibly sputtered region.
8.6.3 Calibration of depth scale by optical interferometry
8.6.3.1 Measure the crater depth d using the calibrated optical interferometer, in accordance with the manufacturer’s instructions or a local documented procedure. The interference fringes used to make the measurement shall pass through the centre and start and finish in negligibly sputtered regions.
8.6.3.2 Detailed procedures for measurement of interference fringes shall be in accordance with the manufacturer’s instructions or a local documented procedure. Hereafter, general procedures are given. Draw two lines through the centre of two adjacent fringes (see Figure 1). One of the lines shall cross the centre of the crater (referred to as line R). Measure the distance x (in arbitrary units) between the two lines. Then measure the shift y (in the same units) of the fringe centre at the crater bottom relative to line R. Count the number of fringes ii intersected by line R at the crater edge.
The stylus profilometry technique used was subjected to an interlaboratory test programme involving 20 laboratories. A reference material having three types of groove for depth scale calibration was measured. Repeatability and reproducibility were calculated in accordance with the principles of ISO 5725-2.
A.2 Design of test programme
Each participating laboratory was asked to measure the depths of three grooves and report three independent results.
A.3 Test specimen
The test specimen used was a commercially available depth scale standard. The certified values of groove depth on the specimen were 2,33 pm (level 1), 0,27 tm (level 2) and 0,029 pm (level 3). The specimen was passed from one laboratory to the next.
A14 Procedure of stylus measurement
The depths of grooves were measured using stylus profilometry by each participant, in accordance with the manufacturer’s instructions or a local documented procedure. Each groove was measured three times.
A.5 Statistical procedures
A.5.1 Scrutiny for consistency and outliers
Cochran’s test, Grubb’s test and the graphical consistency technique were applied independently to the data in accordance with ISO 5725-2. An outlier indicated by all the tests was excluded from the analysis of the level 3 specimen.
A.5.2 Computation of repeatability and reproducibility
The number of laboratories completing the test programme was 20 for the 2,33 Iim and 0,27 pm grooves and 15 for the 0,029 im groove (an outlier was excluded). The results from each laboratory were processed in accordance with ISO 5725-2 to give the mean value, within-laboratory variance and between-laboratory variance. The corresponding repeatability and reproducibility were calculated.
The following information was thus obtained:
the repeatability variance;